Company Filing History:
Years Active: 2024-2025
Title: Innovations by Taehwa Kim: Advancements in Plasma Etching Technology
Introduction
Taehwa Kim, an inventive mind hailing from Hwaseong-si, South Korea, has made significant contributions to the field of semiconductor technology. With a portfolio of two patents, he continues to push the boundaries of innovation as a key contributor at Samsung Electronics Co., Ltd.
Latest Patents
Among his notable inventions, Taehwa Kim has developed an advanced apparatus and method for plasma etching. This innovative system features an electrostatic chuck that consists of a base layer, a bonding layer, and an adsorption layer with multiple protrusions that ensure effective contact with the lower surface of a substrate. The apparatus also includes an edge ring that surrounds the substrate, a series of coolant suppliers that inject a coolant between the protrusions, and pipes that circulate the coolant in a predetermined direction. This technology outlines a cooling device where the plasma etching process undergoes two operations, managing temperature control effectively through a controller that governs the circulation direction of the coolant.
Career Highlights
Taehwa Kim has established himself as a valuable asset to Samsung Electronics Co., Ltd., where he has honed his expertise in plasma etching technologies. His work is critical for enhancing efficiency and precision in semiconductor fabrication processes, which are vital to the electronics industry.
Collaborations
In his journey of innovation, Taehwa Kim collaborates with esteemed colleagues such as Jongwoo Sun and Kyohyeok Kim. Their combined efforts reflect a dedication to excellence in research and development, making noteworthy strides in the competitive landscape of semiconductor technology.
Conclusion
Taehwa Kim's contributions to the field of plasma etching represent a significant advancement in semiconductor manufacturing techniques. As he continues to innovate at Samsung Electronics Co., Ltd., his work will likely pave the way for future developments and improvements in electronic components, reinforcing the importance of collaboration and creativity in the world of technology.