Hsinchu, Taiwan

Szu-Che Tsai


Average Co-Inventor Count = 5.0

ph-index = 1

Forward Citations = 2(Granted Patents)


Company Filing History:

goldMedal1 out of 832,680 
Other
 patents

Years Active: 2000

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1 patent (USPTO):Explore Patents

Title: Inventor Spotlight: Szu-Che Tsai

Introduction

Szu-Che Tsai is a distinguished inventor based in Hsinchu, Taiwan, recognized for his innovative contributions to plasma processing technology. With a focus on creating advanced equipment for producing high-density plasma, Tsai has made significant strides in his field, earning him a noteworthy patent.

Latest Patents

Szu-Che Tsai has been granted a patent for his invention titled "Inductively-coupled high density plasma producing apparatus and plasma." This invention pertains to a specialized apparatus designed for plasma processing. The setup comprises a shape-adjustable coil (antenna), an RF power generator, an impedance matching network, a plasma chamber, a gas supply system, and a vacuum system. Gases are introduced into the plasma chamber, where RF power is applied to the coil, generating plasma. The standout feature of this invention is the shape-adjustable coil, which helps manipulate the RF power profile within the plasma chamber, enabling better control of the plasma density profile and achieving greater uniformity.

Career Highlights

Szu-Che Tsai's career has been marked by his dedication to advancing plasma technology, showcasing his expertise in the design and development of innovative apparatus that enhance efficiency and effectiveness in plasma processing applications. His patent stands as a testament to his ingenuity and commitment to pushing the boundaries of technology.

Collaborations

Throughout his career, Szu-Che Tsai has collaborated with esteemed colleagues, including Keh-Chyang Leou and Chai-Hao Chang. These partnerships have contributed to the development of cutting-edge technologies in the field of plasma processing, highlighting the importance of teamwork in driving innovation.

Conclusion

Szu-Che Tsai exemplifies the spirit of innovation through his groundbreaking work in plasma processing technology. His invention not only reflects his technical prowess but also his dedication to improving scientific applications in various industries. As he continues to push the limits of what's possible, his work will undoubtedly inspire future inventors and researchers in the realm of plasma technology.

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