Sylvie Charpenay

Title: Sylvie Charpenay: Innovator in Semiconductor Process Monitoring

Introduction

Sylvie Charpenay is a prominent inventor based in Vernon, CT (US), known for her significant contributions to the field of semiconductor process monitoring. With a total of 2 patents, she has developed innovative methods that enhance the accuracy and efficiency of measuring properties in semiconductor fabrication processes.

Latest Patents

One of her latest patents is titled "Thermal imaging for semiconductor process monitoring." This method measures the temperature, emissivity, and other properties of relatively smooth surfaces radiating thermal energy. It is particularly adapted for monitoring semiconductor fabrication processes. The temperature is determined by relating measured radiance to the predictions of the Planck radiation law, utilizing knowledge of the emissivity derived from an analysis of the polarization of the thermally emitted radiance. This innovative approach allows for additional information regarding the properties of thin films, such as thickness and composition, to be computed from the emissivity or the ratio of the emissivities measured at two independent polarizations. The data obtained from intrinsic thermal radiance enables measurements to be performed even when providing an extrinsic light source is inconvenient or impossible.

Another notable patent is the "Method and apparatus for measuring the composition and other properties of thin films utilizing infrared radiation." This invention measures the composition, free carrier concentrations, and other properties of thin films and graded layers embedded in film stack structures. The method employs two novel algorithms to extract the composition of a measured layer independently of the confounding effects of additional layers. It can be executed even when calibration samples are not available with the same layered structure as the samples to be measured. By using sample model-based analysis algorithms, the dielectric function of the layer is extracted, allowing for a more straightforward determination of the material's composition.

Career Highlights

Sylvie Charpenay has made significant strides in her career, particularly through her work at MKS Instruments, Inc. Her innovative approaches have positioned her as a leader in the semiconductor industry, contributing to advancements that improve measurement techniques and product analysis.

Collaborations

Throughout her career, Sylvie has collaborated with notable professionals in her field, including Peter Rosenthal and Victor A Yakovlev. These collaborations have further enriched her work and expanded the impact of her inventions.

Conclusion

Sylvie Charpenay's contributions to semiconductor process monitoring through her innovative patents demonstrate her