Susumu Otaguro

Title: Susumu Otaguro: Innovator in Semiconductor Thermal Treatment Systems

Introduction

Susumu Otaguro is a prominent inventor based in Yokohama, Japan. He is known for his contributions to the field of semiconductor technology, particularly in thermal treatment systems. His innovative approach has led to advancements that enhance the efficiency and effectiveness of semiconductor processing.

Latest Patents

Otaguro holds a patent for a thermal treatment system for semiconductors. This system comprises an outer tube made of silicon carbide, a base that hermetically supports the lower portion of the outer tube, and a lid that selectively opens and closes an opening formed in the central portion of the base. Additionally, the system features a reactor wall surrounding the outer peripheral wall of the outer tube, equipped with a heater on the inner side. An annular sealing member and an annular supporting member are interposed between the outer tube and the base, with the supporting member having an effective heat transfer coefficient of 50 to 2,000 W/(m·K).

Career Highlights

Otaguro is associated with Asahi Glass Company, Limited, where he has made significant contributions to semiconductor technology. His work has been instrumental in developing systems that improve thermal treatment processes, which are critical for semiconductor manufacturing.

Collaborations

Throughout his career, Otaguro has collaborated with notable colleagues, including Masaaki Takata and Nobuo Kageyama. These collaborations have fostered innovation and have led to advancements in their respective fields.

Conclusion

Susumu Otaguro's work in semiconductor thermal treatment systems exemplifies the impact of innovative thinking in technology. His contributions continue to influence the semiconductor industry, showcasing the importance of research and development in advancing modern technology.