The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 24, 2006
Filed:
Mar. 26, 2004
Masaaki Takata, Takasago, JP;
Nobuo Kageyama, Takasago, JP;
Susumu Otaguro, Yokohama, JP;
Jiro Nishihama, Aiko-gun, JP;
Masaaki Takata, Takasago, JP;
Nobuo Kageyama, Takasago, JP;
Susumu Otaguro, Yokohama, JP;
Jiro Nishihama, Aiko-gun, JP;
Asahi Glass Company, Limited, Tokyo, JP;
Abstract
A thermal treatment system for semiconductors comprises an outer tube made of silicon carbide, a base hermetically supporting a lower portion of the outer tube, a lid selectively opening and closing an opening formed in a central portion of the base, and a reactor wall surrounding an outer peripheral wall and the like of the outer tube and having a heater provided on an inner side, wherein an annular sealing member and an annular supporting member are interposed between the outer tube and the base, and wherein the supporting member has an effective heat transfer coefficient of 50 to 2,000 W/(m·K).