This inventor holds 2 USPTO granted patents and 1 published patent application. Top assignees: Advanced Micro Devices Corporation, Globalfoundries Inc.. Active years: 2012-2014.
Company Filing History:
1 out of 13,157 
1 out of 5,671 
Years Active: 2012-2014
Title: The Innovations of Susanne Leppack
Introduction
Susanne Leppack is a notable inventor based in Dresden, Germany. She has made significant contributions to the field of semiconductor technology, particularly in the area of copper interconnects. With a total of 2 patents, her work has advanced the understanding and application of materials in electronic devices.
Latest Patents
One of her latest patents is titled "Copper interconnect with metal hardmask removal." This invention involves forming a passivation layer on inlaid copper to protect it against oxidation and removal during the subsequent removal of an overlying metal hardmask. The process includes treating the exposed upper surface of inlaid copper with hydrofluoric acid and a copper complexing agent, such as benzene triazole, to create a passivation monolayer. The method also describes etching to remove the metal hardmask, heating to at least 300° C. to remove the passivation layer, and forming a barrier layer on the exposed upper surface of the inlaid copper.
Another significant patent is the "Method for passivating exposed copper surfaces in a metallization layer of a semiconductor device." This invention enhances the surface integrity of exposed metal surfaces, such as copper, by exposing them to a vapor of a passivation agent. This method improves the integrity of the metal surface while minimizing damage to exposed dielectric surface portions compared to traditional aggressive wet chemical cleaning processes.
Career Highlights
Throughout her career, Susanne has worked with prominent companies in the semiconductor industry, including Globalfoundries Inc. and Advanced Micro Devices Corporation. Her experience in these organizations has allowed her to develop and refine her innovative techniques in semiconductor manufacturing.
Collaborations
Susanne has collaborated with talented individuals in her field, including Christin Bartsch and Matthias Schaller. These partnerships have contributed to her success and the advancement of her inventions.
Conclusion
Susanne Leppack's contributions to semiconductor technology through her patents and collaborations highlight her role as an influential inventor. Her innovative methods for enhancing copper interconnects are paving the way for advancements in electronic devices.