Location History:
- Pittsburgh, PA (US) (1998 - 1999)
- Cranberry Township, PA (US) (2006)
Company Filing History:
Years Active: 1998-2006
Title: Innovations of Suresh Santhanam
Introduction
Suresh Santhanam is an accomplished inventor based in Pittsburgh, PA. He has made significant contributions to the field of microelectromechanical systems (MEMS) with a focus on innovative fabrication processes. With a total of 3 patents, his work has advanced the technology and applications of MEMS devices.
Latest Patents
One of his latest patents is titled "Encapsulation of MEMS devices using pillar-supported caps." This invention comprises a process for fabricating a MEMS microstructure in a sealed cavity. The etchant entry holes are created as a by-product of the fabrication process without an additional step to etch holes in the cap layer. The process involves extending the layers of sacrificial material past the horizontal boundaries of the cap layer. The cap layer is supported by pillars formed by a deposition in holes etched through the sacrificial layers, and the etchant entry holes are formed when the excess sacrificial material is etched away, leaving voids between the pillars supporting the cap.
Another notable patent is "Microelectromechanical structure and process of making same." This invention is directed to a process for fabricating a microelectromechanical device from a substrate carrying at least one layer of a non-erodible material. This layer is laid out to form at least a portion of the microelectromechanical device, along with at least one layer of an erodible material and at least one sacrificial layer. The process includes using the layer of non-erodible material as a mask and anisotropically etching any of the layer of erodible material not occluded by the layer of non-erodible material. Additionally, the process involves isotropically etching the sacrificial layer under at least a beam portion of the microelectromechanical device to free the beam portion from the substrate.
Career Highlights
Suresh Santhanam has worked with prestigious institutions such as Carnegie Mellon University and Ic Mechanics, Inc. His experience in these organizations has allowed him to collaborate on various innovative projects and contribute to advancements in MEMS technology.
Collaborations
Some of his notable coworkers include L Richard Carley and Michael L Reed. Their collaboration has further enriched the research and development efforts in the field of microelectromechanical systems.
Conclusion
Suresh Santhan