Supriya Goyal

Title: Supriya Goyal: Innovator in Dielectric Layer Etching

Introduction

Supriya Goyal is a prominent inventor based in Emeryville, CA (US). She has made significant contributions to the field of semiconductor manufacturing, particularly in the area of dielectric layer etching. With a total of 3 patents to her name, Goyal continues to push the boundaries of innovation in her field.

Latest Patents

One of her latest patents focuses on a method for etching a dielectric layer. This innovative process involves forming a patterned mask with specific features over a dielectric layer. The mask consists of isolated areas and dense areas of the mask features. The trimming of the mask is achieved through multiple cycles, where each cycle includes depositing a deposition layer and selectively etching both the deposition layer and the patterned mask. This selective etching process effectively trims the isolated areas of the mask in relation to the dense areas. Ultimately, the dielectric layer is etched using the trimmed mask, which is then removed.

Career Highlights

Supriya Goyal is currently employed at Lam Research Corporation, a leading company in the semiconductor equipment industry. Her work at Lam Research has allowed her to develop and refine her innovative techniques in dielectric layer etching, contributing to advancements in semiconductor technology.

Collaborations

Throughout her career, Goyal has collaborated with talented individuals such as Dongho Heo and Jisoo Kim. These collaborations have fostered a creative environment that encourages the exchange of ideas and the development of groundbreaking technologies.

Conclusion

Supriya Goyal's contributions to the field of semiconductor manufacturing through her innovative patents and collaborative efforts highlight her role as a key inventor in the industry. Her work continues to influence advancements in technology and etching methods.