Sungbaek Dan

Title: The Innovations of Sungbaek Dan

Introduction

Sungbaek Dan is a notable inventor based in Cheonan, South Korea. He has made significant contributions to the field of electrostatic technology, particularly through his innovative patent related to electrostatic chuck sheets. His work is essential for advancements in substrate handling and processing.

Latest Patents

Sungbaek Dan holds a patent for an "Electrostatic chuck sheet and electrostatic chuck comprising same." This invention discloses an electrostatic chuck sheet that is integral to an electrostatic chuck used for chucking a substrate by utilizing electrostatic force. The electrostatic chuck sheet consists of several layers, including a first dielectric layer made of polymer material, a first electrode layer with conductive metal first electrodes, a second electrode layer with conductive metal second electrodes, an interlayer dielectric layer of polymer material, and a protective layer also made of polymer material. Notably, the arrangement of the first and second electrodes is designed to prevent overlap in the direction perpendicular to the electrostatic chuck sheet.

Career Highlights

Sungbaek Dan is associated with Amosense Co., Ltd., where he continues to innovate and develop technologies that enhance the efficiency and effectiveness of electrostatic chucks. His work has positioned him as a key figure in the field, contributing to the advancement of substrate processing technologies.

Collaborations

Sungbaek Dan has collaborated with notable colleagues, including Kyungwhan Woo and Byoungsu Jin. Their combined expertise has fostered a productive environment for innovation and development within their projects.

Conclusion

Sungbaek Dan's contributions to the field of electrostatic technology through his patent and work at Amosense Co., Ltd. highlight his role as an influential inventor. His innovations continue to impact the industry positively.