Sung-moon Park

Title: Innovations of Sung-moon Park in Plasma Processing Technology

Introduction

Sung-moon Park is a notable inventor based in Suwon, South Korea. He has made significant contributions to the field of semiconductor device fabrication. His innovative work has led to the development of a unique plasma processing system.

Latest Patents

Sung-moon Park holds 1 patent for his invention titled "Dielectric window, plasma processing system including the window, and method of fabricating semiconductor device using the system." This patent describes a plasma process apparatus that includes a process chamber defined by an outer wall and a dielectric window. The dielectric window is designed with a first dielectric material and covers the upper portion of the outer wall. It features a top surface facing outside the process chamber and a bottom surface facing inside. Additionally, the dielectric window includes at least one magnetic-field control groove on its top surface, along with a coil antenna configured to receive RF power.

Career Highlights

Sung-moon Park is currently employed at Samsung Electronics Co., Ltd., where he continues to advance his research and development efforts in semiconductor technologies. His work is pivotal in enhancing the efficiency and effectiveness of plasma processing systems.

Collaborations

He has collaborated with notable colleagues, including Dong-wook Kim and Jung-Hwan Um, contributing to various projects within the semiconductor field.

Conclusion

Sung-moon Park's innovative contributions to plasma processing technology exemplify the importance of research and development in the semiconductor industry. His patent reflects a significant advancement that could impact future technologies.