This inventor holds 1 USPTO granted patent and 2 published patent applications. Top assignee: Samsung Electronics Co., Ltd.. Active years: 2025.
Company Filing History:
Years Active: 2025
Title: Innovations of Sung Min Nam
Introduction
Sung Min Nam is a notable inventor based in Suwon, South Korea. He has made significant contributions to the field of semiconductor technology. His work focuses on improving inspection methods for semiconductor devices.
Latest Patents
Sung Min Nam holds a patent for a "Scanning electron microscope image-based pitch walk inspection method and method of manufacturing semiconductor device comprising the inspection method." This innovative method involves obtaining a scanning electron microscope (SEM) image for a line and space (L/S) pattern formed by multi-patterning technology (MPT). The process includes detecting the main pitch of the L/S pattern, dividing the graph of the main pitch into component pitches, and performing a Fast Fourier Transform (FFT) on each graph. The method ultimately calculates a pitch walk for the L/S pattern by obtaining differences between phase peak values of the compensated FFT phase graphs.
Career Highlights
Sung Min Nam is currently employed at Samsung Electronics Co., Ltd., where he applies his expertise in semiconductor technology. His innovative approach to pitch walk inspection has the potential to enhance the manufacturing process of semiconductor devices significantly.
Collaborations
He has collaborated with colleagues such as Jaeseung Jeong and Seunghune Yang, contributing to advancements in their field.
Conclusion
Sung Min Nam's contributions to semiconductor technology through his innovative patent demonstrate his commitment to advancing the industry. His work continues to influence the development of more efficient manufacturing processes.