This inventor holds 1 USPTO granted patent and 2 published patent applications. Top assignee: Samsung Electronics Ltd.. Active years: 2026.
Company Filing History:
Years Active: 2026
Title: Sumin Park - Innovator in Substrate Processing Technology
Introduction
Sumin Park is a notable inventor based in Yongin, South Korea. He has made significant contributions to the field of substrate processing technology. His innovative work has led to the development of a unique substrate processing apparatus and method.
Latest Patents
Sumin Park holds a patent for a substrate processing apparatus and substrate processing method. This invention includes a chuck that supports a substrate, an insulator ring surrounding the chuck, a focus ring on the insulator ring, and a ground ring outside the insulator ring. The ground ring features a ground ring body and an extension ring, with specific dimensions that enhance its functionality. The difference in level between the top of the extension ring and the top surface of the chuck is designed to be in a range of about 52 mm to about 60 mm. This innovative design aims to improve substrate processing efficiency.
Career Highlights
Sumin Park is currently employed at Samsung Electronics Ltd., where he continues to push the boundaries of technology. His work at this leading company has allowed him to collaborate with other talented professionals in the field.
Collaborations
Some of Sumin Park's coworkers include Hakyoung Kim and Minyoung Hur, who contribute to the innovative environment at Samsung Electronics Ltd. Their collaboration fosters creativity and advancement in substrate processing technologies.
Conclusion
Sumin Park's contributions to substrate processing technology exemplify the spirit of innovation. His patent reflects a commitment to enhancing efficiency in the industry. Through his work at Samsung Electronics Ltd., he continues to make strides in this important field.