Company Filing History:
Years Active: 2015
Title: Innovations of Subrahmanya Mudhivarthi in Chemical Mechanical Planarization
Introduction
Subrahmanya Mudhivarthi is an accomplished inventor based in Tampa, Florida. He has made significant contributions to the field of chemical mechanical planarization (CMP) processing. His innovative work focuses on the development of polymeric microgels that enhance the efficiency and effectiveness of CMP techniques.
Latest Patents
Mudhivarthi holds a patent for "Polymeric microgels for chemical mechanical planarization (CMP) processing." This patent describes the preparation of organic-inorganic composites as colloidal particles of a cross-linked, thermally responsive polymer. The invention involves the formation of hybrid PNIPAM-polysiloxane particles and composite polymeric particles embedded with nanoparticles of inorganic metal-oxides such as CeO2 and TiO2. The use of temperature-responsive microspherical gels of N-isopropylacrylamide (NIPAM) with interpenetrating linear chains of poly(acrylic acid) (PAA) promotes the incorporation of unaggregated nanoparticles. Experimental results indicate that the planarization of silicon oxide wafers using these hybrid particles and composites exhibits lower topographical variations and surface roughness compared to slurries consisting solely of silica or ceria nanoparticles, while achieving similar removal rates and better or comparable frictional characteristics.
Career Highlights
Mudhivarthi is affiliated with the University of South Florida, where he continues to advance research in materials science and engineering. His work has garnered attention for its practical applications in semiconductor manufacturing and related industries.
Collaborations
He has collaborated with notable colleagues, including Vinay K Gupta and Ashok Kumar, to further enhance the research and development of innovative materials and processes.
Conclusion
Subrahmanya Mudhivarthi's contributions to the field of chemical mechanical planarization through his innovative patent demonstrate his commitment to advancing technology in materials science. His work not only improves manufacturing processes but also sets a foundation for future innovations in the industry.