Suwon-si, South Korea

Subong Shon

USPTO Granted Patents = 1 

Average Co-Inventor Count = 5.0

ph-index = 1


Company Filing History:


Years Active: 2025

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1 patent (USPTO):Explore Patents

Title: Subong Shon: Innovator in Semiconductor Technology

Introduction

Subong Shon is a prominent inventor based in Suwon-si, South Korea. He has made significant contributions to the field of semiconductor manufacturing through his innovative designs and technologies. His work has been recognized in the industry, particularly for its impact on the efficiency and effectiveness of semiconductor devices.

Latest Patents

Subong Shon holds a patent for a scanning electron microscope device, semiconductor manufacturing device, and method of controlling a semiconductor manufacturing device. This patent describes a scanning electron microscope (SEM) device that includes an electron beam source configured to emit an electron beam. The device features a lens unit positioned between the electron beam source and a stage that seats an object with patterned structures. The lens unit incorporates a scanning coil that generates an electromagnetic field to provide a lens, along with an astigmatism adjuster. The control unit of the device is designed to change the working distance between the lens unit and the object to obtain multiple original images. It also captures a pattern image where the structures are visible and a series of kernel images that show the distribution of the electron beam on the object. The control unit further adjusts the focus and astigmatism of the lens unit using feature values extracted from the kernel images.

Career Highlights

Subong Shon is currently employed at Samsung Electronics Co., Ltd., a leading company in the technology sector. His role involves developing advanced semiconductor technologies that are crucial for modern electronic devices. His innovative approach has led to improvements in the manufacturing processes and capabilities of semiconductor devices.

Collaborations

Subong Shon has collaborated with notable colleagues, including Yunje Cho and Myungjun Lee. Their teamwork has contributed to the advancement of semiconductor technologies and has fostered a collaborative environment that encourages innovation.

Conclusion

Subong Shon is a key figure in the semiconductor industry, known for his innovative contributions and patents. His work at Samsung Electronics Co., Ltd. continues to influence the development of advanced technologies in semiconductor manufacturing.

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