Location History:
- Sunnyvale, CA (US) (2001)
- Cupertino, CA (US) (2000 - 2002)
Company Filing History:
Years Active: 2000-2002
Title: The Innovative Contributions of Steven T. Li
Introduction
Steven T. Li is a prominent inventor based in Cupertino, CA, known for his significant contributions to the field of semiconductor technology. With a total of 4 patents to his name, Li has developed innovative solutions that enhance the efficiency and effectiveness of semiconductor processing.
Latest Patents
Among his latest patents is the "Heater Temperature Uniformity Qualification Tool." This invention comprises an apparatus designed for a reactor or processing chamber, featuring a resistive heater and a stage that supports substrates like wafers. The apparatus includes multiple temperature sensors that measure temperatures at various points on the stage's surface area, allowing for precise temperature control during processing. Another notable patent is the "Thermal Reflow Method Employing Microwave Energy." This system utilizes microwave energy to expedite the thermal reflow of metal thin-film layers on semiconductor substrates while maintaining optimal gap-filling properties. The design includes a high-Q resonant cavity process chamber that minimizes thermal transfer and enhances the efficiency of the reflow process.
Career Highlights
Steven T. Li is currently employed at Applied Materials, Inc., a leading company in the semiconductor industry. His work focuses on developing advanced technologies that improve semiconductor manufacturing processes. Li's innovative approach has positioned him as a key figure in the field, contributing to the advancement of semiconductor technology.
Collaborations
Throughout his career, Li has collaborated with notable colleagues, including Henry Ho and Aihua Chen. These partnerships have fostered a collaborative environment that encourages innovation and the sharing of ideas.
Conclusion
Steven T. Li's contributions to semiconductor technology through his patents and work at Applied Materials, Inc. highlight his role as an influential inventor in the industry. His innovative solutions continue to shape the future of semiconductor processing.