This inventor holds 2 USPTO granted patents. Top assignee: Applied Materials, Inc.. Active years: 1995-1998.
Company Filing History:
Years Active: 1995-1998
Title: Innovations by Steven Sy Mak
Introduction
Steven Sy Mak is an accomplished inventor based in Pleasanton, CA. He has made significant contributions to the field of semiconductor processing, holding a total of 2 patents. His work focuses on enhancing the efficiency and effectiveness of plasma reactors used in the manufacturing of semiconductor devices.
Latest Patents
One of his latest patents is for an RF plasma reactor with a cleaning electrode designed for cleaning during processing. This invention involves a plasma reactor that contains a chamber for processing gas and utilizes RF power to generate plasma. The reactor is equipped with a surface that is susceptible to contamination, and the invention promotes the bombardment of particles from the plasma onto this surface to remove contaminants. This innovative approach includes a capacitive cleaning electrode that is strategically placed to protect it from direct contact with the plasma.
Another notable patent involves plasma etching using xenon. This process selectively etches a substrate that has grain boundaries and a resist material. By introducing a process gas that includes a primary etchant, a secondary etchant, and xenon into the etch zone, a plasma is generated to form an etch gas. This method allows for fast etching rates with good selectivity and reduced profile microloading, showcasing the effectiveness of xenon in the etching process.
Career Highlights
Steven Sy Mak is currently employed at Applied Materials, Inc., a leading company in the semiconductor industry. His work at Applied Materials has allowed him to develop and refine his innovative technologies, contributing to advancements in semiconductor manufacturing.
Collaborations
Throughout his career, Steven has collaborated with talented individuals such as Brian Shieh and Yan Ye. These collaborations have fostered a creative environment that encourages the development of groundbreaking technologies in the semiconductor field.
Conclusion
Steven Sy Mak's contributions to semiconductor processing through his innovative patents demonstrate his expertise and commitment to advancing technology. His work continues to impact the industry positively, paving the way for future innovations.