Steven S Cooperman

Title: The Innovative Contributions of Steven S. Cooperman

Introduction

Steven S. Cooperman is a notable inventor based in Southborough, MA (US). He has made significant contributions to the field of semiconductor technology, holding a total of 3 patents. His work focuses on improving processes in integrated circuit manufacturing, particularly in chemical mechanical planarization and shallow trench isolation techniques.

Latest Patents

One of Cooperman's latest patents is titled "Chemical mechanical planarization of shallow trenches in semiconductor." This patent presents a new method for planarization of shallow trenches patterned into a semiconductor substrate coated with silicon nitride. The process involves depositing a conformal coating of oxide to fill the trenches, followed by the application of a thin layer of etch-stop silicon and a second layer of oxide. The second layer is then patterned and etched, resulting in blocks of oxide in the depressions above the trenches. Chemical mechanical polishing is subsequently used to achieve excellent global planarity and minimal variation in silicon nitride thickness across active areas.

Another significant patent is the "Shallow trench isolation process for high aspect ratio trenches." This method planarizes the surface of a silicon wafer using shallow trench isolation techniques. The etched trenches are first coated with a silicon nitride protective liner, followed by a conformal coating of silicon oxide. After steam annealing to densify the oxide, the surface is etched and polished back to the tops of the active area mesas, resulting in a substantially planar surface.

Career Highlights

Steven S. Cooperman has had a distinguished career at Digital Equipment Corporation, where he has applied his expertise in semiconductor manufacturing processes. His innovative approaches have contributed to advancements in the efficiency and effectiveness of integrated circuit production.

Collaborations

Cooperman has collaborated with notable colleagues such as Andre I. Nasr and Amitava Bose, further enhancing the impact of his work in the semiconductor industry.

Conclusion

Steven S. Cooperman's contributions to semiconductor technology through his patents and career at Digital Equipment Corporation highlight his role as an influential inventor in the field. His innovative methods continue to shape the future of integrated circuit manufacturing.