Company Filing History:
Years Active: 1991
Title: The Innovative Contributions of Steven M. Gorbatkin
Introduction
Steven M. Gorbatkin is a notable inventor based in Oak Ridge, TN (US). He has made significant contributions to the field of plasma processing technology. His work has led to advancements that are crucial for various applications in the semiconductor industry.
Latest Patents
Gorbatkin holds a patent for a "Plasma generating apparatus for large area plasma processing." This innovative device is designed for plasma processing applications and is based on a permanent magnet line-cusp plasma confinement chamber. It is coupled with a compact single-coil microwave waveguide launcher. The apparatus creates an electron cyclotron resonance (ECR) plasma in the launcher, while a second ECR plasma is generated in the line cusps due to a 0.0875 tesla magnetic field. The special magnetic field configuration reduces the magnetic field at the substrate to below 0.001 tesla. This plasma source is capable of producing large-area (20-cm diameter), highly uniform (±5%) ion beams with current densities exceeding 5 mA/cm². The source has been effectively used to etch photoresist on 5-inch diameter silicon wafers with excellent uniformity.
Career Highlights
Gorbatkin is associated with Martin Marietta Energy Systems, Inc., where he has been instrumental in developing advanced plasma technologies. His work has not only contributed to the company's success but has also pushed the boundaries of what is possible in plasma processing.
Collaborations
Throughout his career, Gorbatkin has collaborated with esteemed colleagues, including Chin-Chi Tsai and Lee A. Berry. These collaborations have fostered innovation and have led to significant advancements in their respective fields.
Conclusion
Steven M. Gorbatkin's contributions to plasma processing technology exemplify the impact of innovative thinking in engineering. His patent and work at Martin Marietta Energy Systems, Inc. highlight his role as a key figure in advancing this important technology.
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