Newton, MA, United States of America

Steven M Ebstein

USPTO Granted Patents = 13 

Average Co-Inventor Count = 1.1

ph-index = 6

Forward Citations = 238(Granted Patents)


Company Filing History:


Years Active: 1995-2021

Loading Chart...
13 patents (USPTO):Explore Patents

Title: The Innovative Mind of Steven M. Ebstein

Introduction

Steven M. Ebstein, an accomplished inventor located in Newton, MA, holds an impressive portfolio of 13 patents. His advancements in technology, particularly in the realm of semiconductor lithography, highlight his significant contributions to the field of innovation.

Latest Patents

Ebstein's latest patent, titled "System for Actinic Inspection of Semiconductor Masks," reveals his cutting-edge approach to semiconductor inspection for extended ultraviolet (EUV) lithography and similar technologies. This patent describes an apparatus and method that utilize a coherent light source with a wavelength of less than 120 nm. Within a vacuum system, an optical arrangement directs this light towards the semiconductor mask or mask blank, capturing the reflected or transmitted light with an imaging sensor. The data from the imaging sensor is processed to generate detailed phase and amplitude images of the object. The imaging modality, particularly a form of digital holography, allows for exceptional imaging of buried structures and offers nanometer resolution, matching or exceeding the feature size of the mask.

Career Highlights

Throughout his career, Steven M. Ebstein has demonstrated his prowess in the field of semiconductor technology. His tenure at companies such as Lexitek, Inc., showcases his depth of knowledge and skill in innovative technologies that push the boundaries of traditional semiconductor production.

Collaborations

Steven has had the opportunity to collaborate with notable individuals including Robert A. Gonsalves and Richard A. Menelly. These partnerships have enhanced his work and contributed to the successful development of inventive technologies within the semiconductor industry.

Conclusion

In summary, Steven M. Ebstein stands out as a passionate inventor whose work continues to influence the domain of semiconductor technology. His innovative spirit and commitment to excellence through his patented inventions highlight the importance of research and collaboration in driving advancements forward. His contributions are not only significant but also pave the way for future innovations in the industry.

This text is generated by artificial intelligence and may not be accurate.
Please report any incorrect information to support@idiyas.com
Loading…