Company Filing History:
Years Active: 1995-2021
Title: The Innovative Mind of Steven M. Ebstein
Introduction
Steven M. Ebstein, an accomplished inventor located in Newton, MA, holds an impressive portfolio of 13 patents. His advancements in technology, particularly in the realm of semiconductor lithography, highlight his significant contributions to the field of innovation.
Latest Patents
Ebstein's latest patent, titled "System for Actinic Inspection of Semiconductor Masks," reveals his cutting-edge approach to semiconductor inspection for extended ultraviolet (EUV) lithography and similar technologies. This patent describes an apparatus and method that utilize a coherent light source with a wavelength of less than 120 nm. Within a vacuum system, an optical arrangement directs this light towards the semiconductor mask or mask blank, capturing the reflected or transmitted light with an imaging sensor. The data from the imaging sensor is processed to generate detailed phase and amplitude images of the object. The imaging modality, particularly a form of digital holography, allows for exceptional imaging of buried structures and offers nanometer resolution, matching or exceeding the feature size of the mask.
Career Highlights
Throughout his career, Steven M. Ebstein has demonstrated his prowess in the field of semiconductor technology. His tenure at companies such as Lexitek, Inc., showcases his depth of knowledge and skill in innovative technologies that push the boundaries of traditional semiconductor production.
Collaborations
Steven has had the opportunity to collaborate with notable individuals including Robert A. Gonsalves and Richard A. Menelly. These partnerships have enhanced his work and contributed to the successful development of inventive technologies within the semiconductor industry.
Conclusion
In summary, Steven M. Ebstein stands out as a passionate inventor whose work continues to influence the domain of semiconductor technology. His innovative spirit and commitment to excellence through his patented inventions highlight the importance of research and collaboration in driving advancements forward. His contributions are not only significant but also pave the way for future innovations in the industry.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.