This inventor holds 1 USPTO granted patent. Top assignee: Honeywell G.m.b.h.. Active years: 1987.
Company Filing History:
Years Active: 1987
Title: The Innovative Contributions of Steven A Hanka
Introduction
Steven A Hanka is a notable inventor based in Minneapolis, MN (US). He has made significant contributions to the field of integrated circuit process monitoring through his innovative patent. His work is recognized for its impact on the characterization of semiconductor devices.
Latest Patents
Hanka holds a patent for a Gated Transmission Line Model (GTLM) structure. This novel characterization device serves as a measurement tool for integrated circuit process monitoring. The GTLM structure features Schottky gates positioned between the ohmic contacts of a Transmission Line Model (TLM) pattern. By varying the gate lengths while keeping the gate-to-ohmic separations constant, it allows for an accurate determination of several important FET channel parameters. This method provides a precise means for measuring the FET source resistance without the need for parameter fitting. It is effective for planar, self-aligned gate, and recessed gate FETs. Additionally, the GTLM structure is the only available method to measure the sheet resistance of enhancement-mode FET channels. It can also be utilized to determine the effective free surface potential and can be combined with capacitance-voltage analysis or geometric magnetoresistance analysis to create mobility and doping profiles of actual FET channels. The GTLM structure is versatile and can be implemented in various semiconductor FET technologies, including silicon, GaAs, and modulation-doped structures.
Career Highlights
Steven A Hanka is currently associated with Honeywell GmbH, where he continues to contribute to advancements in semiconductor technology. His work has been instrumental in enhancing the understanding and measurement of FET parameters, which are crucial for the development of efficient electronic devices.
Collaborations
Hanka has collaborated with notable colleagues, including Steven M Baier and Nicholas C Cirillo, Jr. These collaborations have further enriched his research and development efforts in the field of integrated circuits.
Conclusion
Steven A Hanka's innovative contributions, particularly through his GTLM structure patent, have significantly advanced the field of integrated circuit process monitoring. His work continues to influence the development of semiconductor technologies, showcasing the importance of innovation in this critical area.