This inventor holds 2 USPTO granted patents. Top assignee: Novellus Systems Incorporated. Active years: 2009-2012.
Company Filing History:
Years Active: 2009-2012
Title: Steve Schultz - Innovator in Chemical Mechanical Polishing
Introduction
Steve Schultz is a notable inventor based in Gilbert, AZ (US), recognized for his contributions to the field of chemical mechanical polishing (CMP). With a total of 2 patents, he has made significant advancements in the technology that enhances the efficiency and effectiveness of CMP processes.
Latest Patents
Steve's latest patents include innovative methods for improving chemical mechanical polishing. One of his patents focuses on "Chemical mechanical polishing with multi-zone slurry delivery." This invention enhances CMP by utilizing a polishing pad that contacts the workpiece, along with a multi-zone platen that facilitates slurry delivery. The platen features multiple fluid distribution layers, each with channels that extend from a fluid source to various distribution points on the layer. This design creates multiple fluid-delivery zones on the pad, optimizing the polishing process.
Another significant patent is for "CMP apparatuses with polishing assemblies that provide for the passive removal of slurry." This invention includes a polishing pad with an exhaust aperture that receives slurry from the polishing surface. An underlying member is designed to communicate with the aperture, allowing for efficient slurry removal during the polishing process.
Career Highlights
Steve Schultz has built a successful career at Novellus Systems Incorporated, where he has been instrumental in developing cutting-edge CMP technologies. His work has contributed to advancements in semiconductor manufacturing processes, making them more efficient and effective.
Collaborations
Throughout his career, Steve has collaborated with talented individuals such as Fergal John O'Moore and Brian Severson. These collaborations have fostered innovation and have led to the development of groundbreaking technologies in the field of chemical mechanical polishing.
Conclusion
Steve Schultz is a prominent inventor whose work in chemical mechanical polishing has significantly impacted the industry. His innovative patents and contributions to Novellus Systems Incorporated highlight his dedication to advancing CMP technology.