This inventor holds 1 USPTO granted patent. Top assignee: Vlsi Technology, Inc.. Active years: 1994.
Company Filing History:
Years Active: 1994
Title: Steve J Schaper: Innovator in Semiconductor Technology
Introduction
Steve J Schaper is a notable inventor based in San Antonio, TX (US). He has made significant contributions to the field of semiconductor technology, particularly with his innovative patent that addresses the challenges associated with gaseous materials in semiconductor deposition systems.
Latest Patents
Steve J Schaper holds a patent for a "Thermal trap for gaseous materials." This invention features a semiconductor deposition system characterized by a processing chamber, a source of process gas coupled to an inlet of the processing chamber, a thermal trap coupled to an outlet of the processing chamber, and a pump mechanism that operates to pump gas from the process chamber into the thermal trap. The thermal trap includes an enclosure defining a trap chamber, with an inlet to the trap chamber coupled to the outlet of the processing chamber. It also features a condensable-solid collection surface located within the trap chamber, a mechanism for maintaining the temperature of the collection surface at or below the temperature at which gas condenses into a solid form, and a mechanism for keeping the inner surface of the enclosure above the condensation temperature of the gas. The method for trapping gaseous material involves flowing the gaseous material into a chamber of an enclosure and maintaining the temperature of a collection surface at or below the condensation temperature.
Career Highlights
Steve J Schaper is associated with VLSI Technology, Inc., where he has contributed to advancements in semiconductor technology. His work has been instrumental in developing systems that enhance the efficiency and effectiveness of semiconductor manufacturing processes.
Collaborations
Steve has collaborated with notable colleagues such as Curtis M Hebert, Jr. and Oscar L Caton, who have also made significant contributions to the field of semiconductor technology.
Conclusion
Steve J Schaper's innovative work in semiconductor technology, particularly his patent for a thermal trap for gaseous materials, showcases his commitment to advancing the industry. His contributions continue to influence the field and pave the way for future innovations.