Company Filing History:
Years Active: 2009
Title: Steve Hummel: Innovator in Scatterometry Technology
Introduction
Steve Hummel is a prominent inventor based in Bend, OR (US), known for his contributions to the field of scatterometry. With a total of 3 patents, Hummel has made significant advancements that are particularly beneficial to the semiconductor industry.
Latest Patents
Hummel's latest patents include an "Apparatus and method for enhanced critical dimension scatterometry" and a "Scatterometer having a computer system that reads data from selected pixels of the sensor array." These innovations focus on using scatterometry to determine various parameters of periodic microstructures, pseudo-periodic structures, and other very small structures with feature sizes as small as 100 nm or less. The specific embodiments of these inventions are particularly useful in the semiconductor industry for assessing the width, depth, line edge roughness, wall angle, film thickness, and many other parameters of features formed in microprocessors, memory devices, and other semiconductor devices. Importantly, the applications of these scatterometers and methods extend beyond the semiconductor industry, making them versatile tools in various fields.
Career Highlights
Steve Hummel is currently employed at Nanometrics Inc., where he continues to develop innovative technologies that enhance the capabilities of scatterometry. His work has positioned him as a key figure in advancing measurement techniques that are critical for the production of high-performance semiconductor devices.
Collaborations
Hummel collaborates with talented individuals such as Chris Raymond and Sean Liu, contributing to a dynamic team focused on pushing the boundaries of technology in their field.
Conclusion
Steve Hummel's contributions to scatterometry technology exemplify the impact of innovation in the semiconductor industry. His patents not only enhance measurement techniques but also broaden the scope of applications for scatterometry.