Stephen C Schulz

Title: The Innovative Contributions of Stephen C. Schulz

Introduction

Stephen C. Schulz is a notable inventor based in Benicia, California. He has made significant contributions to the field of magnetron sputtering systems, holding a total of 5 patents. His work focuses on improving the efficiency and effectiveness of sputtering processes, which are essential in various manufacturing applications.

Latest Patents

One of Schulz's latest patents is for an anode structure designed for magnetron sputtering systems. This innovative anode features multiple points that attract electrons, constructed from several wire brushes attached to a metal rod. The design significantly reduces dielectric material build-up and enhances film uniformity in both direct current reactive and non-reactive sputtering. Additionally, this anode structure helps to prevent overheating and extends the operational time of magnetron systems during reactive sputtering of dielectric materials. In one embodiment, the system includes a cylindrical cathode and a pair of elongated anodes positioned parallel to and equidistant from the cathode. This configuration is particularly effective for sputtering uniform films of dielectric materials, such as silicon dioxide and silicon nitride.

Another notable patent involves the use of multiple anodes in a magnetron to improve uniformity. In this design, two or more small anodes are spaced apart, with their electrical power individually controlled to manage the density profile across the plasma. This approach can also be achieved by mechanically moving one or more small anodes or anode masks. When integrated into a magnetron with either a rotating cylindrical cathode or a stationary planar cathode, this design enhances the uniformity of material deposition across the substrate while minimizing adverse effects during the sputtering of dielectric materials.

Career Highlights

Throughout his career, Stephen C. Schulz has worked with several prominent companies, including The Boc Group, Inc. and Ford Motor Company Limited. His experience in these organizations has contributed to his expertise in the field of sputtering technology and materials science.

Collaborations

Schulz has collaborated with notable colleagues such as Peter A. Sieck and Franklin I. Brown. These partnerships have likely fostered innovation and advancements in their respective fields.

Conclusion

Stephen C. Schulz's contributions to the field of magnetron sputtering systems demonstrate his commitment to innovation and excellence. His patents reflect a deep understanding of the complexities involved in sputtering technology,