This inventor holds 1 USPTO granted patent. Top assignee: International Business Machines Corporation. Active years: 1996.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 1996
Title: The Innovations of Stephan E. Lassig
Introduction
Stephan E. Lassig is a notable inventor based in Poughkeepsie, NY (US). He has made significant contributions to the field of electrostatic technology, particularly in the design and functionality of electrostatic chucks.
Latest Patents
Lassig holds a patent for the "Characterization, modeling, and design of an electrostatic chuck." This invention enhances temperature uniformity and adjustment capabilities of the surface of a wafer or wafer-like workpiece during processing. The electrostatic chuck (ESC) is particularly useful in an electron-cyclotron-resonance chemical vapor deposition (ECR-CVD) reactor. Temperature uniformity is achieved through an improved pattern of grooves in the face of the ESC, which allows an inert gas to be contained between the ESC and a wafer held thereby, even at high levels of vacuum. The ESC can be adapted for a specific temperature range by selecting the surface roughness of the remaining areas of the face. Adjustability within that range is accomplished by varying the electrostatic voltage that holds the wafer against the chuck face. Lassig's patent is a testament to his innovative approach to improving semiconductor processing technology.
Career Highlights
Stephan E. Lassig is associated with the International Business Machines Corporation (IBM), where he has contributed to various projects and advancements in technology. His work has been instrumental in enhancing the efficiency and effectiveness of semiconductor manufacturing processes.
Collaborations
Lassig has collaborated with notable colleagues, including Kurt A. Olson and David Edward Kotecki. These partnerships have fostered a creative environment that encourages innovation and the development of cutting-edge technologies.
Conclusion
Stephan E. Lassig's contributions to the field of electrostatic technology and semiconductor processing are noteworthy. His patent for the electrostatic chuck exemplifies his commitment to innovation and excellence in engineering. His work continues to influence the industry and pave the way for future advancements.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile