Sseunhyeun Jo

Title: Sseunhyeun Jo: Innovator in Inspection Systems

Introduction

Sseunhyeun Jo is a notable inventor based in Cupertino, California. He has made significant contributions to the field of inspection systems, particularly with his innovative approach to utilizing extreme ultraviolet (EUV) light.

Latest Patents

Sseunhyeun Jo holds a patent for an "Inspection system with non-circular pupil." This inspection system features an illumination source that generates EUV light. The system includes illumination optics that direct the EUV light to a sample at various off-axis incidence angles. Additionally, it has collection optics that gather light from the sample in response to the incident EUV light. The design incorporates a detector that receives a portion of the collected light. Notably, the illumination pupil distribution corresponds to an off-axis incidence angle along a specific direction on the sample, and at least one of the pupil distributions is non-circular.

Career Highlights

Sseunhyeun Jo is currently employed at Kla Corporation, where he continues to develop advanced technologies in inspection systems. His work has been instrumental in enhancing the capabilities of optical inspection processes.

Collaborations

Some of his coworkers include Damon Floyd Kvamme and Rui-Fang Shi, who contribute to the innovative environment at Kla Corporation.

Conclusion

Sseunhyeun Jo's contributions to the field of inspection systems demonstrate his expertise and commitment to innovation. His patent on the inspection system with non-circular pupil highlights his role as a leading inventor in this specialized area.