Company Filing History:
Years Active: 2017-2018
Title: Innovations of Sook Hyun Lee
Introduction
Sook Hyun Lee is a notable inventor based in Hwaseong-si, South Korea. He has made significant contributions to the field of electron beam lithography, holding a total of 2 patents. His work is primarily associated with Samsung Electronics Co., Ltd., where he continues to innovate and develop advanced technologies.
Latest Patents
Sook Hyun Lee's latest patents include an electron beam lithography method and apparatus. This method involves obtaining a target pattern with a specific width to be formed on a substrate. It also includes acquiring a dose pattern that consists of a fixed dose cell and a variable dose cell, allowing for precise exposure of the substrate using an electron beam. Another significant patent is an exposure method that includes designing a target pattern, producing a first dose map, and creating a second dose map with different dose values. This method enables the irradiation of regions of a photoresist layer on the substrate, which can then be developed and used as an etch mask.
Career Highlights
Throughout his career, Sook Hyun Lee has demonstrated a strong commitment to advancing lithography techniques. His innovative approaches have positioned him as a key figure in the development of cutting-edge technologies at Samsung Electronics Co., Ltd. His contributions have not only enhanced the company's capabilities but have also influenced the broader field of semiconductor manufacturing.
Collaborations
Sook Hyun Lee has collaborated with talented individuals such as Jin Hyeock Choi and Inkyun Shin. These collaborations have fostered a creative environment that encourages the exchange of ideas and the development of groundbreaking technologies.
Conclusion
Sook Hyun Lee's work in electron beam lithography exemplifies the spirit of innovation and dedication to advancing technology. His patents and collaborations reflect his significant impact on the industry, making him a prominent figure in the field of semiconductor technology.