Soo Yun Joh

Title: The Innovative Contributions of Soo Yun Joh

Introduction

Soo Yun Joh is a notable inventor based in Livermore, California. He has made significant contributions to the field of semiconductor technology. His work focuses on enhancing the efficiency of semiconductor wafer processing.

Latest Patents

Soo Yun Joh holds a patent for an "Apparatus and method for enhanced degassing of semiconductor wafers for increased throughput." This innovative design features a multi-level shelf degas station that utilizes at least two heaters integrated within wafer holding shelves. The semiconductor wafers do not come into direct contact with the heater shelves, allowing for conduction heating. The process involves positioning the heater and wafer holder assembly through each wafer slot sequentially. If a degassed wafer is present, a transfer chamber arm removes it, while a loader arm places a new wafer in the available slot. This system allows for individual processing of wafers while maintaining the efficiency of the overall degassing treatment.

Career Highlights

Soo Yun Joh is currently employed at Novellus Systems Incorporated, where he continues to innovate in the semiconductor industry. His work has contributed to advancements in wafer processing technology, enhancing throughput and efficiency.

Collaborations

Soo Yun Joh has collaborated with notable colleagues, including Kenneth K Barber and Mark Fissel. Their combined expertise has furthered the development of innovative solutions in semiconductor technology.

Conclusion

Soo Yun Joh's contributions to semiconductor technology through his innovative patent demonstrate his commitment to enhancing industry standards. His work continues to influence the efficiency of semiconductor wafer processing.