Location History:
- Zhongli, TW (2016)
- Taoyuan, TW (2017)
Company Filing History:
Years Active: 2016-2017
Title: Innovations by Song Yuan Chang in Chemical Mechanical Polishing
Introduction
Song Yuan Chang is a notable inventor based in Taoyuan, Taiwan. He has made significant contributions to the field of chemical mechanical polishing, holding two patents that enhance the performance and quality of polishing processes.
Latest Patents
His latest patents include a chemical mechanical polishing slurry designed for polishing stainless steel substrates. This innovative slurry comprises 10-50 wt % of abrasive particles, 0.001-2.0 wt % of a coolant, 0.001-1.0 wt % of an oxidant, and 10-5000 ppm each of a lubricity improver and a foam inhibitor. The particle size of the abrasive particles ranges from 20-500 nm. This alkaline polishing slurry significantly improves polishing performance, surface quality, and surface passivation effects after the polishing process. Another patent involves a polishing composition that includes abrasive particles, a compound with hexavalent molybdenum or pentavalent vanadium, an anionic additive, and a carrier solvent. This composition is particularly effective for the chemical mechanical polishing of SiGe, Si, and SiO substrates, enhancing the removal rate and polishing selectivity.
Career Highlights
Song Yuan Chang is currently associated with Uwiz Technology Co., Ltd., where he continues to innovate in the field of polishing technologies. His work has been instrumental in advancing the capabilities of chemical mechanical polishing processes.
Collaborations
He collaborates with talented coworkers, including Ming Che Ho and Ming Hui Lu, who contribute to the innovative environment at Uwiz Technology Co., Ltd.
Conclusion
Song Yuan Chang's contributions to chemical mechanical polishing through his patents demonstrate his expertise and commitment to innovation in this specialized field. His work continues to influence the industry positively.