Sivakumar Kumarasamy

Title: The Innovative Contributions of Sivakumar Kumarasamy

Introduction

Sivakumar Kumarasamy is a notable inventor based in Dresden, Germany. He has made significant contributions to the field of semiconductor technology, particularly in the area of platinum residuals in nickel silicide (NiSi) processes. His work is recognized for its impact on improving manufacturing techniques in the semiconductor industry.

Latest Patents

Sivakumar Kumarasamy holds a patent for a "NiSi rework procedure to remove platinum residuals." This innovative procedure addresses the challenge of reducing platinum (Pt) residues that remain after forming Pt-containing NiSi. The method involves applying a specific rework process that includes the use of SPM (Standard Process Material) at a temperature of 130°C in a SWC (Single Wafer Cleaning) tool when Pt residue is detected. The patent outlines a series of steps, including depositing a layer of Ni/Pt on a semiconductor substrate, annealing the layer, and analyzing it for unreacted Pt residue.

Career Highlights

Sivakumar has had a successful career at Globalfoundries Inc., where he has been instrumental in advancing semiconductor manufacturing processes. His expertise in material science and engineering has led to innovative solutions that enhance product quality and efficiency.

Collaborations

Throughout his career, Sivakumar has collaborated with talented professionals in the field, including Clemens Fitz and Markus Lenski. These collaborations have fostered a creative environment that encourages innovation and the sharing of ideas.

Conclusion

Sivakumar Kumarasamy's contributions to semiconductor technology, particularly through his patented NiSi rework procedure, highlight his role as a leading inventor in the industry. His work continues to influence advancements in manufacturing processes, showcasing the importance of innovation in technology.