Tokyo, Japan

Shunichi Yamashita


Average Co-Inventor Count = 9.0

ph-index = 1

Forward Citations = 13(Granted Patents)


Company Filing History:

goldMedal1 out of 832,880 
Other
 patents

Years Active: 2003

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1 patent (USPTO):Explore Patents

Title: Shunichi Yamashita: Innovator in Dry Etching Technology

Introduction

Shunichi Yamashita is a notable inventor based in Tokyo, Japan. He has made significant contributions to the field of dry etching technology, particularly with his innovative approach to environmentally friendly etching gases. His work is crucial in advancing semiconductor manufacturing processes while addressing global environmental concerns.

Latest Patents

Yamashita holds a patent for a fluorocarbon-based dry etching gas. This gas is designed to be free of global environmental problems and is utilized in a dry etching method that employs a plasma gas derived from it. The dry etching gas comprises a fluorinated ether of carbon, fluorine, hydrogen, and oxygen, containing 2-6 carbon atoms. This innovation represents a significant step forward in the quest for sustainable manufacturing practices.

Career Highlights

Throughout his career, Shunichi Yamashita has focused on developing technologies that enhance the efficiency and sustainability of semiconductor fabrication. His dedication to innovation has positioned him as a key figure in the industry, contributing to advancements that benefit both manufacturers and the environment.

Collaborations

Yamashita has worked alongside esteemed colleagues such as Akira Sekiya and Tetsuya Takagaki. Their collaborative efforts have furthered research and development in the field of dry etching technology, leading to improved methodologies and applications.

Conclusion

Shunichi Yamashita's contributions to dry etching technology highlight his commitment to innovation and environmental sustainability. His work continues to influence the semiconductor industry positively, paving the way for future advancements.

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