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Shuji Sugiyama

USPTO Granted Patents = 8

Average Co-Inventor Count = 2.3

ph-index = 4

Forward Citations = 68(Granted Patents)

Location History:

Katsuta, JP (1984 - 1987)
Mito, JP (1990 - 2004)

Company Filing History:

8 out of 42,485

Years Active: 1984-2004

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8 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 6768113 - WORKPIECE HOLDER, SEMICONDUCTOR FABRICATING APPARATUS, SEMICONDUCTOR INSPECTING APPARATUS, CIRCUIT PATTERN INSPECTING APPARATUS, CHARGED PARTICLE BEAM APPLICATION APPARATUS, CALIBRATING SUBSTRATE, WORKPIECE HOLDING METHOD, CIRCUIT PATTERN INSPECTING METHOD, AND CHARGED PARTICLE BEAM APPLICATION METHOD (2004-07-27),

2. 6509564 - WORKPIECE HOLDER, SEMICONDUCTOR FABRICATING APPARATUS, SEMICONDUCTOR INSPECTING APPARATUS, CIRCUIT PATTERN INSPECTING APPARATUS, CHARGED PARTICLE BEAM APPLICATION APPARATUS, CALIBRATING SUBSTRATE, WORKPIECE HOLDING METHOD, CIRCUIT PATTERN INSPECTING METHOD, AND CHARGED PARTICLE BEAM APPLICATION METHOD (2003-01-21),

3. 5214493 - Reduction exposure apparatus with correction for alignment light having (1993-05-25),

4. 5164789 - Method and apparatus for measuring minute displacement by subject light (1992-11-17),

5. 4941745 - Projection aligner for fabricating semiconductor device having (1990-07-17),

6. 4690529 - Optical exposer (1987-09-01),

7. 4615614 - Optical exposure apparatus (1986-10-07),

8. 4477182 - Pattern exposing apparatus (1984-10-16),

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