This inventor holds 1 USPTO granted patent. Top assignee: Horiba, Ltd.. Active years: 2009.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2009
Title: Innovations by Shu Yoshinaga
Introduction
Shu Yoshinaga is a notable inventor based in Kyoto, Japan. He has made significant contributions to the field of foreign matter inspection technology. His work focuses on enhancing the accuracy of inspections on substrates used in circuit pattern formation.
Latest Patents
Yoshinaga holds a patent for a "Foreign matter inspection apparatus and method." This innovative apparatus is designed to inspect foreign matter on substrates where circuit patterns, such as reticles or masks, are formed. The technology aims to reduce false detection caused by scattered or diffracted light from circuit patterns. It also minimizes the occurrence of undetected foreign matters. The apparatus utilizes a light source, such as a scanning laser beam, with a specific polarization angle directed at the inspection object substrate. A main detector is employed to extinguish scattered or diffracted light from the circuit pattern and detect an output signal. Additionally, a reference detector captures the scattered or diffracted light and detects its output signal. A signal processor then calculates a difference signal by subtracting the intensity of the polarization component detected by the reference detector from that detected by the main detector. This process allows for the discrimination between signals caused by the circuit pattern and those caused by foreign matter.
Career Highlights
Shu Yoshinaga is currently associated with Horiba, Ltd., a company known for its advanced analytical and measurement instruments. His work at Horiba has been instrumental in developing technologies that enhance inspection processes in various industries.
Collaborations
Yoshinaga has collaborated with Toyoki Kanzaki, a fellow innovator, to further advance the field of foreign matter inspection technology. Their combined expertise has contributed to the development of more effective inspection methods.
Conclusion
Shu Yoshinaga's contributions to the field of foreign matter inspection technology highlight his innovative spirit and dedication to improving inspection accuracy. His patent and work at Horiba, Ltd. demonstrate the impact of his inventions on the industry.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile