Shu Kusano

Title: The Innovations of Shu Kusano

Introduction

Shu Kusano is a prominent inventor based in Miyagi, Japan. He has made significant contributions to the field of plasma processing technology, holding a total of 7 patents. His work focuses on improving inspection methods and wastage determination in plasma processing apparatuses.

Latest Patents

One of his latest patents is an inspection method and plasma processing apparatus. This method involves monitoring the power of a reflected wave from a power supply that generates plasma. It aims to obtain a fluctuation amount of a measured value shortly after the power wave is supplied. The fluctuation amount can indicate variations in peak-to-peak voltage at the lower electrode of the substrate support or fluctuations in impedance of a load that includes the lower electrode.

Another notable patent is a wastage determination method and plasma processing apparatus. This invention includes a chamber with a gas inlet for supplying two different gases, one containing fluorine. A plasma generator creates plasma from these gases, while an optical emission spectrometer measures light emission intensities of radicals originating from both gases. A processor then determines the wastage rate of an expendable part based on these measurements.

Career Highlights

Shu Kusano is currently employed at Tokyo Electron Limited, a leading company in the semiconductor manufacturing equipment industry. His innovative work has positioned him as a key figure in advancing plasma processing technologies.

Collaborations

He has collaborated with notable coworkers, including Akihiro Yokota and Shinji Himori, who share his commitment to innovation in the field.

Conclusion

Shu Kusano's contributions to plasma processing technology through his patents and collaborations highlight his role as an influential inventor. His work continues to impact the industry positively.