Shinji Kojima

Title: **The Innovations of Shinji Kojima: A Pioneer in Electrostatic Technology**

Introduction

Shinji Kojima, an esteemed inventor based in Gunma, Japan, has made significant contributions to the field of electrostatic technology. With a total of three patents to his name, Kojima's innovations stand at the forefront of advancements in semiconductor object handling.

Latest Patents

Kojima's latest patent focuses on an electrostatic holding apparatus that incorporates an insulating layer, which facilitates the easy attachment and detachment of semiconductor objects. This apparatus utilizes a voltage applied to a conductive electrode covered with an insulating dielectric layer, enabling it to electrostatically attract objects. The core component of this insulating layer is a ceramic that includes 0.1-30 wt. % of an atomic metal, achieving a volume resistivity of 10 Ω·cm at 20°C. The metals used in this innovative design include molybdenum (Mo) or tungsten (W), contributing to a strong electrostatic force while ensuring that the layer permits object removal once the voltage application ceases. Importantly, the design eliminates fine cracks and pores in the insulating layer after sintering, thereby enhancing its withstand voltage.

Another notable patent from Kojima is a ceramic-titanium nitride electrostatic chuck. This invention features a ceramic electrostatic chuck made up of two insulating ceramic layers with a metallic electrode layer sandwiched between them. The technology enables a rapid on-off response to applied voltages without diminishing the high electrostatic attraction force. This advancement is achieved by employing a specific ceramic material that includes highly resistive ceramic materials like alumina, mixed with titanium nitride at a concentration not exceeding 5% by weight, ensuring a volume resistivity in the range of 1.0 x 10^8 to 1.0 x 10^13 ohm.cm at 20°C.

Career Highlights

Shinji Kojima is currently associated with Shin-Etsu Chemical Co., Ltd., a leading company in the production of advanced materials and technologies. His inventive work in electrostatic applications has not only advanced the company's offerings but has also gained recognition in the semiconductor industry.

Collaborations

Throughout his career, Kojima has collaborated with notable colleagues, including Yoshihiro Kubota and Makoto Kawai. Their teamwork has resulted in several breakthroughs that further enhance the effectiveness and applicability of electrostatic technologies in various industrial settings.

Conclusion

Shinji Kojima's contributions to electrostatic technology showcase his innovative spirit and commitment to enhancing semiconductor handling processes. With his patented inventions, he continues to influence the industry, paving the way for future advancements in electrostatic applications. His work emphasizes the importance of collaboration, innovation, and continuous improvement in the field of technology.