This inventor holds 4 USPTO granted patents. Top assignee: Kokusai Electric Co., Ltd.. Active years: 1998-2001.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 1998-2001
Title: Innovations by Shinichiro Watahiki
Introduction
Shinichiro Watahiki is a prominent inventor based in Tokyo, Japan. He has made significant contributions to the field of semiconductor manufacturing and treatment object conveyor systems. With a total of 4 patents to his name, Watahiki's work has advanced the technology used in various industrial applications.
Latest Patents
Watahiki's latest patents include a treatment object conveyor apparatus and a semiconductor manufacturing apparatus. One of his notable inventions is a method and apparatus for conveying a treatment object, which features a drive unit for a treatment object conveyor robot deployed inside a vacuum chamber. This innovative design ensures that the drive unit is protected from damage by accommodating it within an airtight vessel. The conveyor arm of the robot is located outside the vessel, while an elevator mechanism allows for the robot to be raised and lowered within the chamber. The airtight structure is maintained using O rings, ensuring a secure connection between the bellows and the shaft.
Another significant patent is a substrate processing apparatus that includes a substrate transfer chamber and multiple substrate holders. This apparatus is designed to facilitate the transfer of substrates between processing and holding chambers, utilizing advanced robotic mechanisms to enhance efficiency and precision in semiconductor manufacturing.
Career Highlights
Watahiki is currently employed at Kokusai Electric Co., Ltd., where he continues to innovate and develop new technologies. His work has been instrumental in improving the efficiency and reliability of semiconductor manufacturing processes.
Collaborations
Throughout his career, Watahiki has collaborated with notable colleagues, including Hisashi Yoshida and Yukinori Aburatani. These partnerships have contributed to the advancement of technology in their respective fields.
Conclusion
Shinichiro Watahiki's contributions to the field of semiconductor manufacturing and treatment object conveyor systems highlight his innovative spirit and dedication to advancing technology. His patents reflect a commitment to improving industrial processes and ensuring the reliability of manufacturing systems.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile