Location History:
- Miyagi-gun, JP (2011 - 2014)
- Miyagi, JP (2014 - 2024)
Company Filing History:
Years Active: 2011-2024
Title: Shinichiro Hayasaka: Innovator in Gas Flow Measurement Technology
Introduction
Shinichiro Hayasaka is a prominent inventor based in Miyagi, Japan. He has made significant contributions to the field of gas flow measurement, holding a total of 6 patents. His innovative approaches have advanced the technology used in various industrial applications.
Latest Patents
Hayasaka's latest patents include a method and apparatus for measuring gas flow. This invention provides a comprehensive gas flow measuring method that involves measuring the first pressure of a gas in both a first and a second flow path. The method includes supplying gas to these flow paths by alternating between gas supply and cessation, while also measuring the gas supply time. Additionally, it involves measuring the second pressure and temperature of the gas, as well as the third and fourth pressures after gas is exhausted. The gas flow is then calculated based on these measurements and corrected according to theoretical parameters.
Another notable patent is a method for determining the output flow rate of gas from a flow rate controller in a substrate processing apparatus. This method selects a pressure sensor based on the set flow rate, ensuring that the measurable maximum pressure of the second sensor exceeds that of the first. The target pressure of a chamber is established according to the set flow rate, and the pressure is monitored until it reaches the target after gas output begins. The output flow rate is determined from the rate of pressure rise in the chamber.
Career Highlights
Shinichiro Hayasaka is currently employed at Tokyo Electron Limited, a leading company in the semiconductor and electronics manufacturing industry. His work focuses on developing advanced technologies that enhance the efficiency and accuracy of gas flow measurement systems.
Collaborations
Hayasaka has collaborated with notable colleagues, including Ken Horiuchi and Takeshi Yokouchi. These partnerships have fostered innovation and contributed to the successful development of his patented technologies.
Conclusion
Shinichiro Hayasaka's contributions to gas flow measurement technology exemplify his dedication to innovation and excellence in engineering. His patents reflect a deep understanding of the complexities involved in gas measurement, making him a valuable asset in his field.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.