Company Filing History:
Years Active: 2011
Title: **Inventor Shin-ichi Yamaguchi: Innovating Silicon Oxide Film Formation**
Introduction
Shin-ichi Yamaguchi, a notable inventor based in Chikuma, Japan, has made significant contributions to the field of semiconductor technology. With a focus on enhancing the fabrication process of silicon oxide films, his innovative methods aim to improve the efficiency and yield of devices produced from Silicon-On-Insulator (SOI) wafers.
Latest Patents
Yamaguchi holds a patent for a method for forming a silicon oxide film on an SOI wafer. This method includes performing thermal oxidation treatment on an SOI wafer that has an oxide film on its backside, followed by an additional heat treatment in a non-oxidizing atmosphere at a higher temperature. This two-step process effectively prevents warping of the SOI wafer, which can occur due to a thick oxide film. As a result, this innovation diminishes exposure and adsorption failures associated with warpage and significantly enhances device fabrication yields.
Career Highlights
Shin-ichi Yamaguchi is associated with Shin-Etsu Handotai Co., Ltd., a leading company in the semiconductor industry. His expertise and innovative work have positioned him as a key player in advancing SOI wafer technology. With a well-documented patent, Yamaguchi contributes to the ongoing evolution of semiconductor manufacturing processes.
Collaborations
Yamaguchi has collaborated with esteemed colleagues, including Isao Yokokawa and Nobuhiko Noto. Their combined efforts have focused on the challenges inherent in semiconductor manufacturing, particularly in maintaining the integrity and effectiveness of SOI wafers during device fabrications.
Conclusion
Shin-ichi Yamaguchi's innovative approach to forming silicon oxide films represents a significant advancement in semiconductor technology. His patent illustrates a method that not only mitigates issues related to SOI wafer warping but also boosts production reliability and device yield. As technology continues to evolve, contributions like those of Yamaguchi will undoubtedly play a crucial role in shaping the future of semiconductor devices.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.