Company Filing History:
Years Active: 2022
Title: Shiliang Lu: Innovator in Spin Coating Technology
Introduction
Shiliang Lu is a prominent inventor based in Shanghai, China. He has made significant contributions to the field of spin coating technology, which is essential in various manufacturing processes, particularly in electronics and materials science. His innovative approach has led to the development of a unique spin coating device that enhances efficiency and stability during operation.
Latest Patents
Shiliang Lu holds a patent for a "Spin coating device and method." This device features a rotatable rotary shaft with a sucker fixed at one end. An electromagnetic induction device is positioned below the sucker, which includes an annular magnet, a coil group formed by a first and second coil, and a strip-shaped magnet fixed at the rotary shaft. The design incorporates a base on the sucker with a notch, allowing for the adjustment of the sucker's surface levelness. This innovation minimizes manual manipulation, enhances stability, reduces equipment damage due to vibration, and improves the effectiveness of photoresist spin-coating while saving time and labor.
Career Highlights
Shiliang Lu is associated with Shanghai Micro Electronics Equipment (Group) Co., Ltd., where he has been instrumental in advancing the company's technological capabilities. His work has not only contributed to the company's success but has also positioned him as a key figure in the field of microelectronics.
Collaborations
Throughout his career, Shiliang Lu has collaborated with notable colleagues, including Hang Ran and Yihui Li. These partnerships have fostered a creative environment that encourages innovation and the sharing of ideas.
Conclusion
Shiliang Lu's contributions to spin coating technology exemplify the impact of innovative thinking in the field of microelectronics. His patented device represents a significant advancement that enhances operational efficiency and stability. As he continues to work with his team, the future of spin coating technology looks promising.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.