Shih-Tung Lan

Title: Shih-Tung Lan: Innovator in Semiconductor Technology

Introduction

Shih-Tung Lan is a notable inventor based in Hsinchu, Taiwan. He has made significant contributions to the field of semiconductor technology, particularly through his innovative patent related to gas ring apparatuses.

Latest Patents

Shih-Tung Lan holds a patent for a gas ring apparatus designed for semiconductor etching. This invention features a gas ring with a curved surface on the edge of the gas-guiding trench. The apparatus includes a ring-shaped body located at the bottom of an etch chamber, which has a gas-guiding trench formed on its bottom surface. The intersection of the sidewall of the gas-guiding trench and the bottom surface of the ring-shaped body features a curved bending surface. Additionally, at least one gas hole extends from the top surface of the ring-shaped body to the gas-guiding trench. The apparatus is equipped with a first and a second ring-shaped seal situated on the bottom surface, along with a blocking layer covering the surface of the ring-shaped body. This innovative design enhances the efficiency of semiconductor etching processes.

Career Highlights

Shih-Tung Lan is currently associated with Mosel Vitelic Corporation, where he continues to advance semiconductor technologies. His work has been instrumental in improving the performance and reliability of semiconductor manufacturing processes.

Collaborations

Shih-Tung Lan has collaborated with notable colleagues, including Kuang-Yung Wu and Sheng-Kai Chang. These partnerships have fostered a collaborative environment that encourages innovation and the development of cutting-edge technologies.

Conclusion

Shih-Tung Lan's contributions to semiconductor technology through his innovative patent demonstrate his commitment to advancing the field. His work at Mosel Vitelic Corporation and collaborations with esteemed colleagues further highlight his impact on the industry.