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Kawasaki, Japan

Shigeru Takemoto

USPTO Granted Patents = 4 (Patent Applications = 1)

Average Co-Inventor Count = 2.7

ph-index = 3

Forward Citations = 113(Granted Patents)

Location History:

Kanagawa, JP (1989)
Kawasaki, JP (1993 - 2001)

Company Filing History:

Nikon Corporation

Years Active: 1989-2001

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4 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 6184526 - Apparatus and method for inspecting predetermined region on surface of specimen using electron beam (2001-02-06),

2. 5764361 - Interferometer, adjusting method therefor, stage apparatus having the (1998-06-09),

3. 5200841 - Apparatus for binarizing images (1993-04-06),

4. 4870693 - Mask inspecting apparatus (1989-09-26),

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