Kawasaki, Japan

Shigeru Hagiwara


Average Co-Inventor Count = 1.6

ph-index = 9

Forward Citations = 236(Granted Patents)


Location History:

  • Kanagawa-ken, JP (1999)
  • Kawasaki, JP (1995 - 2003)
  • Ageo, JP (2003)
  • Tokyo, JP (2001 - 2004)

Company Filing History:


Years Active: 1995-2004

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11 patents (USPTO):Explore Patents

Title: Shigeru Hagiwara: Innovator in Exposure Apparatus Technology

Introduction

Shigeru Hagiwara is a prominent inventor based in Kawasaki, Japan. He has made significant contributions to the field of exposure apparatus technology, holding a total of 11 patents. His work has been instrumental in advancing the efficiency and effectiveness of microdevice production.

Latest Patents

Hagiwara's latest patents include an innovative exposure apparatus that features a sealed chamber defined by a first lens and a second lens in an input lens system. This design allows for effective gas exchange, where impurity gas is exhausted and replaced with high-purity nitrogen gas, maintaining optimal conditions within the sealed chamber. Another notable patent involves a light source portion that includes a laser resonator housed in an environment control chamber. This setup ensures uniform temperature control across the entire optical system, thereby improving productivity and reducing production costs in microdevice manufacturing.

Career Highlights

Shigeru Hagiwara has dedicated his career to enhancing exposure apparatus technology. His inventions have not only improved the functionality of these devices but have also contributed to the overall efficiency of microdevice production processes. His expertise in this area has made him a valuable asset to his company.

Collaborations

Hagiwara has collaborated with notable colleagues such as Takashi Mori and Masato Hamatani. Their combined efforts have led to advancements in exposure apparatus technology, further solidifying their contributions to the field.

Conclusion

Shigeru Hagiwara's innovative work in exposure apparatus technology has significantly impacted the microdevice manufacturing industry. His patents reflect a commitment to improving production processes and reducing costs, showcasing his role as a leading inventor in this specialized field.

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