This inventor holds 1 USPTO granted patent. Top assignees: Kabushiki Kaisha Tokuda Seisakusho, Kabushiki Kaisha Toshiba. Active years: 1987.
Company Filing History:
1 out of 7 
1 out of 53,250 
Years Active: 1987
Title: Shigeki Hazano: Innovator in Semiconductor Device Production
Introduction
Shigeki Hazano is a notable inventor based in Yokohama, Japan. He has made significant contributions to the field of semiconductor device production. His innovative approach has led to the development of advanced apparatuses that enhance the efficiency and effectiveness of semiconductor manufacturing processes.
Latest Patents
Shigeki Hazano holds a patent for an "Apparatus for producing semiconductor devices." This apparatus features a series of treatment chambers, including a load chamber, etching chamber, sputtering chamber, ion implantation chamber, CVD chamber, unload chamber, transfer chamber, heat-treatment chamber, and rinsing chamber. These chambers are connected in a U-shape to facilitate various treatments of semiconductor wafers. The design includes a wafer conveyor and transfer means that allow for the reversible movement of wafers through the treatment chambers. This feature enables easy detection of dust attached to the wafers. Additionally, the heat-treatment chamber employs a unique method of applying hot air and contact heating to ensure uniform treatment in a short time. The inner surfaces of the etching chamber are lined with detachable linings for easier maintenance.
Career Highlights
Throughout his career, Shigeki Hazano has worked with prominent companies, including Toshiba Corporation and Tokuda Seisakusho. His experience in these organizations has contributed to his expertise in semiconductor technology and innovation.
Collaborations
Shigeki Hazano has collaborated with notable colleagues such as Masahiro Shibagaki and Hidetaka Jyo. These partnerships have further enriched his work and contributed to advancements in the semiconductor industry.
Conclusion
Shigeki Hazano's contributions to semiconductor device production through his innovative patent demonstrate his significant impact on the industry. His work continues to influence the development of efficient manufacturing processes for semiconductor technology.