Location History:
- Nirasaki, JP (2004)
- Miyagi, JP (2018)
- Yamanashi, JP (2020 - 2022)
Company Filing History:
Years Active: 2004-2025
Title: Shigeki Doba: Innovator in Substrate Processing Technology
Introduction
Shigeki Doba is a prominent inventor based in Yamanashi, Japan. He has made significant contributions to the field of substrate processing, holding a total of 6 patents. His innovative work focuses on methods and apparatuses that enhance the efficiency and effectiveness of substrate processing.
Latest Patents
Doba's latest patents include a substrate processing method and a substrate processing apparatus. The substrate processing method involves a unique approach to processing a substrate using a specialized apparatus. This apparatus features a processing container designed to facilitate substrate processing, a plasma generation space, and a lifting mechanism that raises and lowers the substrate during plasma processing. This method aims to create a potential change in the substrate, enhancing the overall processing quality.
The substrate processing apparatus is designed to generate plasma from gas using high-frequency energy. It includes a high-frequency power supply, a gas supply source, and a mounting table for the substrate. The apparatus is equipped with a partition plate that divides the processing chamber into distinct spaces, ensuring efficient processing while suppressing ion passage.
Career Highlights
Shigeki Doba has established himself as a key figure in the substrate processing industry. His work at Tokyo Electron Limited has allowed him to develop cutting-edge technologies that are widely recognized in the field. His innovative approaches have contributed to advancements in substrate processing techniques, making him a valuable asset to his company and the industry as a whole.
Collaborations
Doba has collaborated with notable colleagues, including Hajime Naito and Hiroyuki Ogawa. These partnerships have fostered a collaborative environment that encourages innovation and the sharing of ideas, further enhancing the development of substrate processing technologies.
Conclusion
Shigeki Doba's contributions to substrate processing technology are noteworthy and impactful. His innovative patents and collaborative efforts have positioned him as a leading inventor in this specialized field. His work continues to influence advancements in substrate processing, showcasing the importance of innovation in technology.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.