Company Filing History:
Years Active: 1988-2005
Title: Shantia Riahi: Innovator in Chemical Vapor Deposition
Introduction
Shantia Riahi is a prominent inventor based in Vista, CA (US). She has made significant contributions to the field of chemical vapor deposition, particularly in the enhancement of titanium nitride deposition processes. With a total of 5 patents to her name, Riahi's work has implications for semiconductor manufacturing and materials science.
Latest Patents
Riahi's latest patents focus on the deposition of titanium amides. The process she developed enhances the chemical vapor deposition of titanium nitride from titanium-containing precursors, such as tetrakis(dimethylamino)titanium and tetrakis(diethylamino)titanium. By reacting these precursors with ammonia, she produces titanium nitride on semiconductor substrates. The addition of organic amines, like dipropylamine, in specific weight percentages significantly improves the deposition rate of titanium nitride. Furthermore, her research indicates that the presence of hydrocarbons, such as n-decane, can hinder this deposition process.
Career Highlights
Shantia Riahi is currently employed at Air Products and Chemicals, Inc. Her innovative work in the field has positioned her as a key figure in advancing technologies related to semiconductor materials.
Collaborations
Riahi has collaborated with notable coworkers, including Andre Lagendijk and Matthias J Jahl, contributing to the collective expertise in her field.
Conclusion
Shantia Riahi's contributions to the field of chemical vapor deposition and her innovative patents highlight her role as a leading inventor in semiconductor technology. Her work continues to influence advancements in materials science and manufacturing processes.