Company Filing History:
Years Active: 2023-2025
Title: Shai Mark: Innovator in Substrate Cleaning Technologies
Introduction
Shai Mark is a prominent inventor based in Kibutz Snir, Israel. He has made significant contributions to the field of substrate cleaning technologies, holding a total of 7 patents. His innovative work focuses on enhancing the efficiency and effectiveness of cleaning processes in various applications.
Latest Patents
Among his latest patents, Shai Mark has developed an in-situ process chamber chuck cleaning system. This cleaning assembly includes a substrate with one or more patterns formed on its bottom side. These patterns are designed to attract particles from a chuck through electrostatic attraction or mechanical trapping when the substrate is positioned on the chuck. Another notable patent is the electrostatic substrate cleaning system and method. This system features a chamber and a substrate stage that secures a substrate for cleaning with a cleaning head. The system includes a robot that transfers the substrate between a storage receptacle and the substrate stage. The cleaning head utilizes a disposable electrode ribbon loaded on a roller assembly, which electrostatically removes particles from the substrate.
Career Highlights
Shai Mark is currently employed at Kla Corporation, where he continues to innovate and develop advanced cleaning technologies. His work has significantly impacted the efficiency of substrate cleaning processes, making them more effective and reliable.
Collaborations
Shai collaborates with talented individuals such as Adi Pahima and Mor Azaria, contributing to a dynamic and innovative work environment.
Conclusion
Shai Mark's contributions to substrate cleaning technologies exemplify his dedication to innovation and excellence. His patents reflect a commitment to improving cleaning processes, making a lasting impact in the industry.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.