This inventor holds 3 USPTO granted patents and 1 published patent application. Top assignee: Rorze Systems Corporation. Active years: 2018-2025.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2018-2025
Title: Seung Bae Oh: Innovator in Substrate Transferring Technology
Introduction
Seung Bae Oh is a notable inventor based in Yongin-si, South Korea. He has made significant contributions to the field of substrate transferring technology, holding a total of 3 patents. His work focuses on improving the efficiency and functionality of substrate transferring apparatuses.
Latest Patents
One of his latest patents is a substrate transferring apparatus designed to reduce nitrogen gas usage for purging and minimize shutdown time. This innovative apparatus includes a ventilation driving room, a FOUP receiving room, a driving equipment room, and a ventilation duct. The ventilation driving room is equipped with a main fan that blows air downward, while the FOUP receiving room is situated beneath it to accommodate a FOUP for storing substrates. The driving equipment room is located under the FOUP receiving room, and the ventilation duct connects the two rooms for optimal airflow.
Another significant patent is the purge module jig and purge module that incorporates the jig. This invention features a plate with a recessed groove and an opening, a gas transfer pipe with an elliptical cross-section, and a fixing part that secures the plate and gas transfer pipe together. This design prevents leakage of cleaning gas, reduces thickness, minimizes interference between the jig and wafer cassette, and enhances performance across various load ports from different manufacturers.
Career Highlights
Seung Bae Oh is currently employed at Rorze Systems Corporation, where he continues to innovate in the field of substrate transferring technology. His work has been instrumental in advancing the capabilities of substrate handling systems.
Collaborations
He has collaborated with notable colleagues such as Masahiko Uchiyama and Tae Young Eom, contributing to the development of cutting-edge technologies in their field.
Conclusion
Seung Bae Oh is a prominent inventor whose work in substrate transferring technology has led to significant advancements. His innovative patents reflect his commitment to improving efficiency and functionality in the industry.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile