Company Filing History:
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Years Active: 2013
Title: Sergey Alexandrovich Nikiforov: Innovator in Inductively Coupled Plasma Processing
Introduction
Sergey Alexandrovich Nikiforov is a notable inventor based in Miryang-si, South Korea. He has made significant contributions to the field of plasma processing technology, particularly in methods that enhance the efficiency and effectiveness of processing cylindrical materials with complex three-dimensional surfaces.
Latest Patents
Nikiforov holds a patent for a "Method and chamber for inductively coupled plasma processing for cylindrical material with three-dimensional surface." This invention focuses on an inductively coupled plasma processing chamber designed for cylindrical workpieces with three-dimensional profiles. The technology aims to achieve low plasma contamination, confine dense uniform plasma in the substrate vicinity, and suppress secondary electrons emitted from the substrate. This method is applicable to various substrates, including semiconductor devices, metals, glass, ceramics, and polymers with micro or nano patterns.
Career Highlights
Throughout his career, Nikiforov has worked with prominent organizations such as the Korea Electrotechnology Research Institute and New Optics, Ltd. His experience in these institutions has allowed him to develop and refine his innovative approaches to plasma processing.
Collaborations
Nikiforov has collaborated with esteemed colleagues, including Sung Il Chung and Hyeon Seok Oh. These partnerships have contributed to the advancement of his research and the successful implementation of his patented technologies.
Conclusion
Sergey Alexandrovich Nikiforov is a distinguished inventor whose work in inductively coupled plasma processing has the potential to revolutionize various industries. His innovative methods and collaborative efforts continue to push the boundaries of technology in this field.