Seongsil Lee

Title: Seongsil Lee: Innovator in Substrate Inspection Technology

Introduction

Seongsil Lee is a prominent inventor based in Hwaseong-si, South Korea. He has made significant contributions to the field of semiconductor device fabrication and substrate inspection. With a total of 2 patents to his name, Lee's work is instrumental in advancing technology in this critical area.

Latest Patents

Lee's latest patents include a system and method of inspecting substrates and a method of fabricating semiconductor devices using the same. The substrate inspection system he developed features a substrate support, optics for irradiating a patterned structure, and an image processor that calculates an optimal focus offset for defect detection. This innovative approach allows for precise inspection of patterned structures, which may include varying heights in their designs. Additionally, his substrate inspection apparatus incorporates a light source, a support, a detector, and a light adjuster, enabling effective defect detection through optical interactions.

Career Highlights

Seongsil Lee is currently employed at Samsung Electronics Co., Ltd., where he continues to push the boundaries of technology in semiconductor manufacturing. His expertise in substrate inspection systems has positioned him as a key player in the industry.

Collaborations

Lee has collaborated with notable colleagues, including Jeongho Ahn and Jae-Man Oh, contributing to the development of advanced technologies in their field.

Conclusion

Seongsil Lee's innovative work in substrate inspection technology exemplifies the importance of precision in semiconductor fabrication. His contributions are vital to the ongoing advancements in this essential industry.