Company Filing History:
Years Active: 1995-1999
Title: The Innovative Contributions of Seong-oon Choi
Introduction
Seong-oon Choi is a prominent inventor based in Suwon, South Korea. He has made significant contributions to the field of semiconductor technology, particularly in lithography processes. With a total of 5 patents to his name, Choi's work has had a substantial impact on the industry.
Latest Patents
Choi's latest patents focus on projection exposure systems. One of his notable inventions involves a projection method that utilizes a modified illumination technique for lithography processes in semiconductor devices. This method enhances the resolution of lithography by removing the vertical incident component of light that passes through a condenser lens. The innovative approach allows for the destructive interference of zero-order diffracted light and constructive interference of the oblique component of first-order diffracted light. As a result, the obliquely incident light effectively illuminates a mask with a specific pattern. The removal of the vertical incident component is achieved through a phase difference of light, which is influenced by a grating mask or pattern on the back surface of the conventional mask. This advancement improves the contrast and depth of focus in lithography processes, enabling the formation of patterns for 64 Mb DRAMs using standard projection exposure systems.
Career Highlights
Choi is currently employed at Samsung Electronics Co., Ltd., where he continues to innovate and develop new technologies. His work has been instrumental in advancing semiconductor manufacturing techniques, making him a valuable asset to the company.
Collaborations
Choi has collaborated with notable colleagues, including Ho-Young Kang and Cheol-hong Kim. Their combined expertise has contributed to the success of various projects within the semiconductor field.
Conclusion
Seong-oon Choi's contributions to semiconductor technology through his innovative patents and collaborations highlight his importance in the industry. His work continues to influence advancements in lithography processes, showcasing the impact of dedicated inventors in shaping the future of technology.